Open AccessGas phase reaction study of gan in cold wall mocvd reactor by induction heating
Author(s) -
Ligen Lu,
Zhiming Li,
Lili Zhao,
Guoqiang Ren,
Li Feng
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/490/4/042051
Subject(s) - metalorganic vapour phase epitaxy , chemical vapor deposition , materials science , work (physics) , phase (matter) , gas phase , radical , chemical reaction , chemical engineering , chemistry , thermodynamics , organic chemistry , nanotechnology , layer (electronics) , epitaxy , physics , engineering