Open AccessLocal laser annealing of 3C-SiC film deposited on the silicon substrate by CVD
Author(s) -
A. V. Avramchuk,
I. Komissarov,
М. М. Михалик,
V. Yu. Fominski,
Р. И. Романов,
A. O. Sultanov,
N. V. Siglovaya,
S. M. Ryndya,
А. С. Гусев,
В. А. Лабунов,
Н. Каргин
Publication year - 2019
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/475/1/012036
Subject(s) - materials science , annealing (glass) , silicon , optoelectronics , silicon carbide , laser , substrate (aquarium) , composite material , optics , physics , oceanography , geology