Open AccessSensitivity Performance of Single Wall Carbon Nanotubes Gas Sensor on Silicon and Porous Silicon
Author(s) -
Asama N. Naje,
Waleed k. Mahmood
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/454/1/012070
Subject(s) - materials science , porous silicon , carbon nanotube , silicon , etching (microfabrication) , substrate (aquarium) , wafer , nanotechnology , porosity , frit compression , chemical engineering , composite material , layer (electronics) , optoelectronics , carbon nanotube supported catalyst , carbon nanofiber , oceanography , engineering , geology