Open AccessEffect of substrate thickness on coating roughness Ti/AlTiN during interaction process Parameter
Author(s) -
Kamil Jawad Kadhim,
Shakir M. Mousa
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/454/1/012002
Subject(s) - materials science , tungsten carbide , coating , grain size , surface roughness , crystallite , microstructure , substrate (aquarium) , biasing , sputter deposition , sputtering , surface finish , tungsten , composite material , voltage , metallurgy , thin film , nanotechnology , electrical engineering , oceanography , engineering , geology