Open AccessEffect of deposition time on tribological and adhesion characteristics of niobium nitride thin films
Author(s) -
Violeta Merie,
G. Negrea,
Marius Pustan,
B.V. Neamţu,
Ștefan Ionuț Crăciun
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/444/3/032002
Subject(s) - niobium nitride , materials science , thin film , sputter deposition , niobium , nitride , deposition (geology) , tantalum nitride , physical vapor deposition , silicon nitride , nanotechnology , composite material , metallurgy , sputtering , silicon , layer (electronics) , paleontology , sediment , biology