Open AccessFormation of the thin film heterostructures CuO/ZnO by RF magnetron sputtering powder targets
Author(s) -
Nikolay Mukhin,
Д. А. Чигирев,
Liubov Bakhchova,
Г. А. Коноплев,
Konstantin Kochunov,
I N Kashkul
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/387/1/012054
Subject(s) - materials science , heterojunction , optoelectronics , thin film , sputter deposition , sputtering , zinc , cavity magnetron , band gap , oxide , metallurgy , nanotechnology