Open AccessDistribution of coating thickness applied by magnetron sputtering
Author(s) -
S A Martsinukov,
D. K. Kostrin,
A. A. Lisenkov,
В. А. Симон
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/387/1/012051
Subject(s) - coating , materials science , sputter deposition , sputtering , cavity magnetron , high power impulse magnetron sputtering , distribution (mathematics) , composite material , nanotechnology , thin film , mathematics , mathematical analysis