Open AccessPreparation of Vanadium Oxide Thin Films under Different Annealing Conditions
Author(s) -
HE Chang-an,
Qingguo Wang,
Zhaoming Qu
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/381/1/012127
Subject(s) - materials science , annealing (glass) , thin film , sputter deposition , ceramic , vanadium , cavity magnetron , sputtering , vanadium oxide , oxide , tube furnace , composite material , optoelectronics , metallurgy , chemical engineering , nanotechnology , engineering