Open AccessStudy on Oxidation Resistance of TiAlN Films Deposited by Magnetron Sputtering
Author(s) -
Hongying Huo,
Min Zou
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/378/1/012014
Subject(s) - indentation hardness , materials science , sputter deposition , thin film , substrate (aquarium) , alloy , metallurgy , sputtering , cavity magnetron , composite material , microstructure , nanotechnology , oceanography , geology