Open AccessValidation of mathematical model for CZ process using small-scale laboratory crystal growth furnace
Author(s) -
Kristaps Bergfelds,
Andrejs Sabanskis,
J. Virbulis
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/355/1/012004
Subject(s) - transient (computer programming) , scale (ratio) , crystal (programming language) , process (computing) , materials science , crystal growth , silicon , mechanics , process engineering , mechanical engineering , computer science , thermodynamics , engineering , metallurgy , physics , quantum mechanics , programming language , operating system