Open AccessReduction of Defects on Microstructure Aluminium Nitride Using High Temperature Annealing Heat Treatment
Author(s) -
Z. Tanasta,
Pauziah Muhamad,
Noriyuki Kuwano,
H. M. Y. Norfazrina,
M. H. Unuh
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/328/1/012019
Subject(s) - materials science , aluminium nitride , microstructure , nitride , annealing (glass) , aluminium , thin film , ceramic , composite material , sapphire , transmission electron microscopy , metallurgy , optics , nanotechnology , layer (electronics) , laser , physics