Open AccessVariable angle spectroscopic ellipsometric characterization of HfO2thin film
Author(s) -
Mukesh Kumar,
Neelam Kumari,
Vinod Karar,
Amit L. Sharma
Publication year - 2018
Publication title -
iop conference series materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/310/1/012132
Subject(s) - materials science , thin film , ellipsometry , substrate (aquarium) , analytical chemistry (journal) , deposition (geology) , evaporation , optics , characterization (materials science) , quartz , hafnia , crystal (programming language) , composite material , chemistry , nanotechnology , ceramic , paleontology , cubic zirconia , oceanography , physics , chromatography , sediment , computer science , biology , programming language , geology , thermodynamics
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