Effect of flexure beam geometry and material on the displacement of piezo actuated diaphragm for micropump
Author(s) -
R Roopa,
P. Navin Karanth,
S. M. Kulkarni
Publication year - 2018
Publication title -
iop conference series materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/310/1/012111
Subject(s) - brass , materials science , deflection (physics) , micropump , diaphragm (acoustics) , hinge , structural engineering , stiffness , composite material , beryllium , engineering , metallurgy , copper , optics , electrical engineering , nanotechnology , physics , nuclear physics , loudspeaker
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