Open AccessPiezoelectric Lead Zirconate Titanate (PZT) Ring Shaped Contour-Mode MEMS Resonators
Author(s) -
P. V. Kasambe,
V. V. Asgaonkar,
A. D. Bangera,
A. S. Lokre,
S. S. Rathod,
D. V. Bhoir
Publication year - 2018
Publication title -
iop conference series materials science and engineering
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/310/1/012069
Subject(s) - lead zirconate titanate , piezoelectricity , resonator , materials science , microelectromechanical systems , acoustics , piezoelectric coefficient , piezoelectric accelerometer , optoelectronics , ferroelectricity , composite material , dielectric , physics
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