Open AccessFocussed ion beam thin sample microanalysis using a field emission gun electron probe microanalyser
Author(s) -
Yugo Kubo
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/304/1/012007
Subject(s) - microanalysis , electron microprobe , acceleration voltage , analytical chemistry (journal) , materials science , field emission gun , microprobe , beam (structure) , thin film , electron , cathode ray , optics , physics , chemistry , mineralogy , nanotechnology , nuclear physics , metallurgy , organic chemistry , chromatography