Open AccessStudy on Surface Roughness of Modified Silicon Carbide Mirrors polished by Magnetorheological Finishing
Author(s) -
Hang Du,
Ci Song,
Shengyi Li
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/301/1/012164
Subject(s) - silicon carbide , materials science , surface roughness , surface finish , magnetorheological fluid , carbide , polishing , composite material , surface (topology) , surface finishing , silicon , metallurgy , optics , engineering , structural engineering , geometry , physics , mathematics , damper