Open AccessProperties of planar structures based on Policluster films of diamond and AlN
Author(s) -
А. F. Belyanin,
А. П. Лучников,
С.А. Налимов,
Alexander Bagdasarian
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/289/1/012041
Subject(s) - materials science , raman spectroscopy , diamond , silicon , sputter deposition , sputtering , scanning electron microscope , boron , material properties of diamond , diffraction , optoelectronics , thin film , nanotechnology , metallurgy , optics , composite material , chemistry , physics , organic chemistry