Open AccessModeling of a bimetallic MEMS-based infrared detector
Author(s) -
E Ph Pevtsov,
S V Breev,
Т А Деменкова
Publication year - 2018
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/289/1/012022
Subject(s) - bimetal , bimetallic strip , detector , capacitive sensing , microelectromechanical systems , sensitivity (control systems) , microbolometer , infrared , materials science , optoelectronics , optics , electronic engineering , bolometer , engineering , physics , electrical engineering , metallurgy , metal