Open AccessPhotonic jet μ-etching: from static to dynamic process
Author(s) -
Andri Abdurrochman,
Sylvain Lecler,
Julien Zelgowski,
Frédéric Mermet,
Joël Fontaine,
Bernard Y Tumbelaka
Publication year - 2017
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/196/1/012043
Subject(s) - etching (microfabrication) , materials science , optics , laser , photonics , beam (structure) , jet (fluid) , dielectric , optoelectronics , wavelength , nanotechnology , physics , layer (electronics) , thermodynamics