Open AccessEffect of oxygen plasma etching on graphene’s mechanical and electrical properties
Author(s) -
Pengfei Jia,
Fabin Pan,
Tianhang Chen
Publication year - 2017
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/182/1/012030
Subject(s) - graphene , etching (microfabrication) , materials science , plasma etching , graphene nanoribbons , plasma , oxygen , reactive ion etching , layer (electronics) , dry etching , graphene oxide paper , x ray photoelectron spectroscopy , nanotechnology , surface finish , composite material , chemical engineering , chemistry , physics , organic chemistry , quantum mechanics , engineering