Open AccessAnalysis of the bending stiffness and adhesion effect in RF-MEMS structures
Author(s) -
Corina Bîrleanu,
Marius Pustan,
Cristian Dudescu,
Violeta Merie,
I M Pintea
Publication year - 2017
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/174/1/012029
Subject(s) - microelectromechanical systems , cantilever , bending , materials science , stiffness , bending stiffness , structural engineering , electronic engineering , nanotechnology , composite material , engineering