Open AccessDifferent approaches for SiO2 inelastic electron scattering cross section spectra dissolving
Author(s) -
A. Yu. Igumenov,
T. A. Andryushchenko
Publication year - 2022
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1230/1/012007
Subject(s) - inelastic scattering , cross section (physics) , spectral line , scattering , atomic physics , electron scattering , electron , inelastic neutron scattering , physics , materials science , chemistry , optics , nuclear physics , quantum mechanics
Inelastic electron scattering cross section spectra (Kλ-spectra) of SiO 2 were dissolved into bulk-loss and surface-loss components using factor analysis and Tougaard functions approximation. Primary electron energy dependences of various components intensities were received. It was shown that joint using of factor analysis and Tougaard functions approximation allows receiving more reliable results in inelastic electron scattering cross section spectra studies.