Open AccessDiamond-Like Carbon Thin Films from Low-Pressure and High-Density CH4 Plasma
Author(s) -
Sucharita Saha,
Debajyoti Das
Publication year - 2022
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1221/1/012037
Subject(s) - raman spectroscopy , materials science , thin film , analytical chemistry (journal) , plasma , torr , inductively coupled plasma , diamond like carbon , substrate (aquarium) , carbon fibers , carbon film , radio frequency power transmission , optoelectronics , chemistry , nanotechnology , optics , composite number , composite material , amplifier , physics , oceanography , cmos , chromatography , quantum mechanics , geology , thermodynamics
DLC thin films were grown using a low-pressure high-density CH 4 /Ar plasma on glass substrates in a planar RF (13.56 MHz) inductively coupled plasma (ICP) CVD system. Using a plasma triggered by RF power to a mixture of 20 sccm CH 4 and 50 sccm Ar gas maintained at a low pressure of ∼30 mTorr, a series of samples were prepared by varying the substrate temperature and then changing the RF power. The optimised DLC films, obtained at 500 °C and 900 W demonstrated a high optical transmission of ∼97 % corresponding to awideoptical band gap of ∼3.58 eV; and a minimum of I D /I G ∼0.61 along witha maximum ofI Dia /I D ∼1.32 in Raman analysis established the maximum sp 3 /sp 2 content in the carbon network.