Open AccessDesign of the Capacitive Dual-Mass Micromechanical Gyroscope
Author(s) -
A. V. Styazhkina,
A. A. Belogurov,
Ya. V. Belyaev,
A.T. Tulaev
Publication year - 2022
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1215/1/012010
Subject(s) - gyroscope , capacitive sensing , dual (grammatical number) , accelerometer , inertial frame of reference , computer science , inertial measurement unit , finite element method , electronic engineering , engineering , control engineering , aerospace engineering , electrical engineering , physics , structural engineering , art , literature , quantum mechanics , operating system
Development of micromechanical inertial sensors have made it possible to use them in the navigation and motion control systems. This application area imposes strict requirements on sensors. One of the ways to meet the requirements and to improve the gyroscope characteristics is to apply a dual- or multi-mass architecture of a gyroscope sensing element. This paper presents the results of dual-mass micromechanical gyroscope with a measurement range of ±450°/s design. The complex design method, including simulation at the system level, model refinement based on the results of finite element modelling, and modelling of individual electronic blocks at the circuit level, is described.