Open AccessMicrostructure of Al-Mg thin free-standing films
Author(s) -
Lucia Bajtošová,
Rostislav Králík,
Barbora Křivská,
Hana Libenská,
Jozef Veselý,
Miroslav Cieslar
Publication year - 2021
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1178/1/012005
Subject(s) - materials science , transmission electron microscopy , microstructure , sputtering , sputter deposition , thin film , substrate (aquarium) , composite material , grain size , perpendicular , deposition (geology) , optics , analytical chemistry (journal) , nanotechnology , chemistry , geometry , chromatography , biology , paleontology , oceanography , mathematics , physics , sediment , geology
Thin Al-Mg films were prepared by a DC magnetron sputtering on glass substrates covered with photoresist and subsequently free-standing samples were released from the substrate. The surface morphology, grain size and orientations were characterized by atomic force microscopy and transmission electron microscopy equipped with automated orientation and phase mapping software. The grain growth mechanism during sputtering is consistent with sputter deposition oblique incidence theory for growth. Strong preferred (110) orientation in direction perpendicular to the sample surface has been observed in all studied samples.