Open AccessEffect of sputtering target's grain size on the sputtering yield, particle size and coercivity (Hc) of Ni and Ni20Al thin films
Author(s) -
Mohammad Reza,
Zainuddin Sajuri,
Jumril Yunas,
Junaidi Syarif
Publication year - 2016
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/114/1/012116
Subject(s) - sputtering , coercivity , grain size , materials science , thin film , particle size , yield (engineering) , analytical chemistry (journal) , composite material , condensed matter physics , nanotechnology , chemistry , physics , chromatography