Open AccessElectrothermal micro tweezer for biomedical applications
Author(s) -
C. Joshitha,
D. Ragavyshnavi,
Dhiman Priyanka,
P. Nagarjuna,
B. S. Sreeja
Publication year - 2021
Publication title -
iop conference series. materials science and engineering
Language(s) - English
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1070/1/012072
Subject(s) - displacement (psychology) , actuator , microelectromechanical systems , plane (geometry) , materials science , voltage , finite element method , mechanical engineering , optoelectronics , nanotechnology , engineering , electrical engineering , structural engineering , psychology , geometry , mathematics , psychotherapist
This paper presents design, simulation and results analysis for a novel micro tweezer. The principal element in the proposed device is a double U-beam electrothermal actuator. Using FEM tool, Poly-Silicon material is applied to the device structure and analysed for both in-plane and out of plane displacement for respective range of actuation potential. The micro tweezer holder mouth provided a maximum in-plane displacement of ∼48µm at 4.5V actuation voltage. Comparatively negligible out of plane displacement exhibited by the device during simulation. The proposed micro tweezer is designed for the micromanipulation of biological cells in a better way.