Open AccessMultifunctional anemometric microsystem based on silicon carbide
Author(s) -
Д А Евстигнеев,
В. А. Карачинов,
Д. В. Карачинов
Publication year - 2021
Publication title -
iop conference series. materials science and engineering
Language(s) - Uncategorized
Resource type - Journals
eISSN - 1757-899X
pISSN - 1757-8981
DOI - 10.1088/1757-899x/1047/1/012054
Subject(s) - microsystem , pendulum , silicon carbide , volumetric flow rate , thermal , materials science , silicon , mechanics , mechanical engineering , physics , optoelectronics , thermodynamics , nanotechnology , engineering , composite material