Open AccessA driving power with filter compensator for micro-positioning improvement of piezoelectric bimorph actuators
Author(s) -
Wei Chen,
Yuansheng Chen,
Cong Gu,
Pengcheng Zhao
Publication year - 2020
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/617/1/012050
Subject(s) - bimorph , modular design , control theory (sociology) , amplifier , filter (signal processing) , voltage , actuator , piezoelectricity , power (physics) , charge amplifier , engineering , electronic engineering , computer science , operational amplifier , electrical engineering , physics , control (management) , cmos , quantum mechanics , artificial intelligence , operating system
To improve the micro-positioning accuracy of piezoelectric bimorph actuators, a driving power was designed with filter compensator. Amplifier modular was designed with high-voltage operational amplifier, and filter compensator modular is responsible for charge signal. Simulation results show that the output of filter compensator modular is proportional to the electric charge on the actuator. Experimental results indicate that the maximum error is 10μm without filter compensator modular, and reduced to 5μm with proposed driving power.