Open AccessMulti-surface phase demodulation based on the selective weighted multi-step algorithms
Author(s) -
Lin Chang,
Yingjie Yu,
Wanhua Zheng,
Qian Xu,
Chen Wang,
Tao Sun,
Tingtui Liu
Publication year - 2020
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.179
H-Index - 26
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/602/1/012002
Subject(s) - demodulation , interferometry , interference (communication) , algorithm , computer science , phase (matter) , residual , surface (topology) , key (lock) , optics , mathematics , telecommunications , physics , channel (broadcasting) , geometry , computer security , quantum mechanics
The transparent parallel plate plays a practical role in the optical system. The accurate measurement of its surface topography is a great importance of quantifying and evaluating the performance of the transparent plate. Based on the phase shifting interferometry, a measurement method using triple iteration and selective phase demodulation algorithms is presented, which can realize multi-surface interferometry at arbitrary positions. Through the design of the three-dimensional data matrix used to store errors, its element pixels can be read out a wealth of key parameter information, thus guiding the design of the algorithm, realizing the unity of the actual use of the algorithm and the measurement scheme, achieving the multi-surface interference measurement with the minimum residual errors with arbitrary cavity length, and expanding the limitations of the traditional weighted multi-step algorithm.