Open AccessLow Temperature Oxidation of GaAs by UV Stimulated Plasma Anodizing
Author(s) -
Amiran Bibilashvili,
Zurab Kushitashvili
Publication year - 2016
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.179
H-Index - 26
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/44/3/032002
Subject(s) - anodizing , oxide , x ray photoelectron spectroscopy , materials science , plasma , gallium arsenide , auger electron spectroscopy , auger , analytical chemistry (journal) , optoelectronics , chemistry , chemical engineering , atomic physics , metallurgy , aluminium , physics , quantum mechanics , chromatography , nuclear physics , engineering