
Establishment of a New Analysis Method for Trace Nitrogen Trifluoride in Helium detection by Gas Chromatography
Author(s) -
Qiyi Yin,
Ling Chen,
Lifang Ye,
Xiangrui Jia,
Yuanwen Mao,
Yang Zhou,
Jianqin Zhou,
Yetian Huang
Publication year - 2019
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.179
H-Index - 26
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/267/3/032087
Subject(s) - calibration curve , gas chromatography , helium , chemistry , impurity , nitrogen , calibration , analytical chemistry (journal) , gravimetric analysis , chromatography , detection limit , mathematics , organic chemistry , statistics
In this experiment, a method for the determination of trace nitrogen trifluoride in helium (NF 3 /He) by gas chromatography (GC) was established. First, a series of NF 3 /He gas standard substance with accurate concentration was prepared by gravimetric method. And then, we had analyzed for the trace nitrogen and oxygen impurities in NF 3 , and the specific property experiment was used to verify that the impurity did not affect the measured value of the component. However, the analytical calibration curve of NF 3 was nonlinear in the concentration range from 1 to 1000 μmol⋅mol −1 . Nonlinear curves were transformed into linear curves by a linear power method, and the formula for the uncertainty of the fitting curve was calculated. Moreover, the consistency and uncertainty of the blind test results were evaluated. The results show that the method has high precision; the nitrogen or oxygen impurity has no effect on the specificity of the method; consistentcy of blind sample test result is well. Furthermore, it may be an ideal method for the research on the trace NF 3 in helium.