Open AccessLangmuir probe measurements of an RF driven high-density inductively coupled argon plasma
Author(s) -
Weiyuan Ni,
Guicai Song,
Dongping Liu
Publication year - 2019
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.179
H-Index - 26
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/242/2/022043
Subject(s) - langmuir probe , plasma , inductively coupled plasma , argon , electron temperature , atomic physics , plasma diagnostics , electron density , plasma parameters , inductively coupled plasma atomic emission spectroscopy , chemistry , materials science , analytical chemistry (journal) , physics , quantum mechanics , chromatography