Open AccessResearch and Design of a Motion Sensor Based on MEMS
Author(s) -
Changsong Qi,
Guangwei Wang,
Ting Lin,
ZhiLing Hou
Publication year - 2018
Publication title -
iop conference series. earth and environmental science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.179
H-Index - 26
eISSN - 1755-1307
pISSN - 1755-1315
DOI - 10.1088/1755-1315/170/2/022012
Subject(s) - microelectromechanical systems , key (lock) , electricity , computer science , filter (signal processing) , volume (thermodynamics) , electronic engineering , real time computing , automotive engineering , engineering , electrical engineering , materials science , computer security , physics , optoelectronics , quantum mechanics