Open AccessHigh-dose MeV electron irradiation of Si-SiO2 structures implanted with high doses Si+
Author(s) -
S. Kaschieva,
Ch. Angelov,
С. Н. Дмитриев
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/992/1/012059
Subject(s) - irradiation , fluence , materials science , silicon , electron beam processing , ion , analytical chemistry (journal) , electron , atomic physics , chemistry , nuclear physics , optoelectronics , physics , organic chemistry , chromatography