Open AccessTi- and Cr-based hard coatings obtained at low temperatures by unbalanced magnetron sputtering
Author(s) -
T. Cholakova,
V. Chitanov,
Lyliana Kolaklieva,
Roumen Kakanakov,
Bogdan Ranguelov,
Severina Atanasova,
P. Stefanov,
Genoveva Atanasova,
Konstantin Balashev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/992/1/012030
Subject(s) - cavity magnetron , materials science , sputter deposition , high power impulse magnetron sputtering , sputtering , metallurgy , thin film , nanotechnology