Open AccessStructural and optical properties of SiC-SiO2 nanocomposite thin films
Author(s) -
I. Bozetine,
A. Keffous,
S. Kaci,
H. Menari,
A. Manseri
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/987/1/012029
Subject(s) - materials science , photoluminescence , thin film , fourier transform infrared spectroscopy , scanning electron microscope , deposition (geology) , analytical chemistry (journal) , silicon , substrate (aquarium) , nanocomposite , sputter deposition , secondary ion mass spectrometry , silicon oxide , sputtering , optoelectronics , optics , nanotechnology , mass spectrometry , composite material , chemistry , paleontology , physics , oceanography , silicon nitride , chromatography , sediment , geology , biology