Open AccessDesign, Simulation and Fabrication of A MEMS-based Double-layer Spiral Planar Inductor with Patterned Permalloy as Magnetic Layers
Author(s) -
Xiaomin Zhu,
Ping Cheng,
Mingming Chen,
Guifu Ding
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/986/1/012036
Subject(s) - permalloy , inductance , materials science , inductor , electromagnetic coil , eddy current , planar , optoelectronics , electromagnetic shielding , electrical engineering , magnetic field , composite material , engineering , physics , computer science , voltage , magnetization , computer graphics (images) , quantum mechanics