Open AccessEffect of Slice Error of Glass on Zero Offset of Capacitive Accelerometer
Author(s) -
Rui Hao,
Huijun Yu,
Wu Zhou,
Bei Peng,
Junyu Guo
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/986/1/012019
Subject(s) - wafer , accelerometer , materials science , offset (computer science) , chip , capacitive sensing , capacitance , silicon , optoelectronics , electrical engineering , engineering , physics , computer science , electrode , quantum mechanics , programming language