Open AccessA novel MEMS inertial switch with a reinforcing rib structure and electrostatic power assist to prolong the contact time
Author(s) -
Jian Li,
Yan Wang,
Zhuoqing Yang,
Guifu Ding,
Xiaolin Zhao,
Hong Wang
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/986/1/012011
Subject(s) - microelectromechanical systems , contact force , inertia , vibration , materials science , mechanical engineering , engineering , computer science , acoustics , optoelectronics , physics , classical mechanics , quantum mechanics