Open AccessStudy on film resistivity of Energy Conversion Components for MEMS Initiating Explosive Device
Author(s) -
Wang Ren,
Bin Zhang,
Yang Zhao,
Enyi Chu,
Ming Yin,
Hui Li,
Kexuan Wang
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/986/1/012004
Subject(s) - microscale chemistry , explosive material , microelectromechanical systems , materials science , electrical resistivity and conductivity , energy transformation , specific energy , electrical resistance and conductance , composite material , optoelectronics , nanotechnology , electrical engineering , engineering , thermodynamics , chemistry , mathematics education , mathematics , organic chemistry , physics