Open AccessStructural and morphological study on ZnO:Al thin films grown using DC magnetron sputtering
Author(s) -
Budi Astuti,
Sugianto Sugianto,
Siti Nor Mahmudah,
Rofiatul Zannah,
Ngurah Made Darma Putra,
Putut Marwoto,
Didik Aryanto,
Edy Wibowo
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/983/1/012012
Subject(s) - materials science , thin film , sputter deposition , annealing (glass) , full width at half maximum , diffraction , sputtering , analytical chemistry (journal) , cavity magnetron , substrate (aquarium) , composite material , optoelectronics , nanotechnology , optics , chemistry , physics , oceanography , chromatography , geology