Open AccessExistence conditions for a low-pressure high-current discharge in a cylindrical magnetron
Author(s) -
S. Yu. Udovichenko,
A. A. Lisenkov,
D. K. Kostrin
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/967/1/012018
Subject(s) - cavity magnetron , glow discharge , electric discharge in gases , current (fluid) , materials science , residual , discharge pressure , electron , voltage , gas pressure , atomic physics , plasma , electric discharge , magnetic field , mechanics , electrical engineering , chemistry , physics , electrode , thermodynamics , sputtering , engineering , thin film , nanotechnology , mathematics , gas compressor , algorithm , quantum mechanics , petroleum engineering