Open AccessRF plasma probe diagnostics: a method for eliminating measurement errors for Langmuir probes with bare protective shields
Author(s) -
V. A. Riaby,
П. Е. Машеров,
V. Savinov,
V. G. Yakunin
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/958/1/012006
Subject(s) - plasmatron , argon , anode , plasma , langmuir probe , arc (geometry) , atomic physics , analytical chemistry (journal) , drop (telecommunication) , conductivity , hydrogen , chemistry , plasma diagnostics , materials science , physics , electrical engineering , electrode , geometry , mathematics , organic chemistry , quantum mechanics , chromatography , engineering