Open AccessThe active control devices of the size of products based on sapphire measuring tips with three degrees of freedom
Author(s) -
Е. V. Leun,
V. I. Leun,
V. К. Sysoev,
K. A. Zanin,
A. V. Shulepov,
P. A. Vyatlev
Publication year - 2018
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/944/1/012073
Subject(s) - degrees of freedom (physics and chemistry) , control (management) , sapphire , computer science , materials science , optics , artificial intelligence , physics , laser , quantum mechanics