Open AccessAl-oxynitride interfacial layer investigations for PrXOYon SiC and Si
Author(s) -
Karsten Henkel,
Konstantin Karavaev,
Mohamed Torche,
Carola Schwiertz,
Yevgen Burkov,
Dieter Schmeißer
Publication year - 2008
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/94/1/012004
Subject(s) - materials science , silicon , silicon oxynitride , silicon carbide , semiconductor , optoelectronics , analytical chemistry (journal) , composite material , silicon nitride , chemistry , chromatography