Open AccessPlasma of a vacuum-arc discharge for obtaining carbon-based coatings
Author(s) -
M. I. Pikus,
A. A. Lisenkov,
D. K. Kostrin,
S. A. Trifonov
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/929/1/012093
Subject(s) - plasma , materials science , vacuum arc , graphite , carbon fibers , coating , electric arc , sputtering , deposition (geology) , flux (metallurgy) , carbide , jet (fluid) , substrate (aquarium) , composite material , thin film , metallurgy , nanotechnology , chemistry , electrode , mechanics , composite number , paleontology , biology , physics , oceanography , quantum mechanics , sediment , geology