Open AccessThe formation of multi-axis micromechanical gyroscopes and accelerometers using surface micromachining
Author(s) -
E Yu Gusev,
J Y Jityaeva,
A. V. Bykov
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/929/1/012055
Subject(s) - surface micromachining , gyroscope , bulk micromachining , accelerometer , materials science , microelectromechanical systems , wafer , undercut , etching (microfabrication) , fabrication , lithography , optoelectronics , nanotechnology , composite material , computer science , engineering , aerospace engineering , medicine , alternative medicine , pathology , layer (electronics) , operating system