Open AccessImprovement of technical purpose materials performance characteristics with the radio frequency low pressure plasma
Author(s) -
Liliia Yu. Makhotkina,
В И Христолюбова
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/927/1/012032
Subject(s) - durability , structuring , process engineering , materials processing , computer science , quality (philosophy) , radio frequency , prime (order theory) , sample (material) , materials science , manufacturing engineering , reliability engineering , environmental science , telecommunications , engineering , chemistry , mathematics , business , physics , finance , chromatography , quantum mechanics , database , combinatorics