Open AccessMaterials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam
Author(s) -
N. G. Korobeishchikov,
I. V. Nikolaev,
M. A. Roenko
Publication year - 2017
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/927/1/012026
Subject(s) - materials science , root mean square , argon , surface roughness , surface finish , ion beam , nanometre , ion , smoothing , cluster (spacecraft) , beam (structure) , optics , anisotropy , composite material , atomic physics , chemistry , physics , quantum mechanics , computer science , computer vision , programming language , organic chemistry